DutchBoy S: On-Device AI Platform for Yield Improvement and Downtime Reduction DutchBoy S is an on-device AI platform developed to improve semiconductor yield and minimize equipment downtime. It analyzes real-time time-series sensor and metrology data from etching equipment using deep learning-based AI models to automatically detect process anomalies and identify root causes of defects. The AI model, trained on process mechanisms, autonomously analyzes correlations among over 200 sensors embedded in the equipment. It provides multidimensional diagnostic insights that help resolve complex defect issues—traditionally reliant on the expertise of seasoned engineers. Deployed as an appliance-type server directly on the tool, DutchBoy S visualizes AI analysis results in real time through an intuitive on-site dashboard, driving improvements in productivity and yield on the manufacturing floor.