Artenix AI is a next-generation battery solution engineered to deliver power to wafer-level sensors used in AI semiconductor manufacturing. As AI chips continue to scale down while increasing in complexity and three-dimensional architecture, conventional batteries cannot function under the required process conditions. Artenix AI addresses this by operating reliably in extreme environments such as high vacuum (1 mTorr), rapid thermal cycling, and high electromagnetic interference. It features an ultra-thin form factor (<0.024 in) with exceptional surface flatness, enabling seamless integration into inline metrology and process monitoring systems without affecting photolithography or etching accuracy. Based on LiBEST’s proprietary meta-phase electrolyte, the battery offers near-zero thermal expansion, long cycle life, and no leakage under vacuum. Designed specifically for smart wafer systems and MEMS-based sensors, Artenix AI enhances process visibility, chip yield, and equipment uptime while minimizing power footprint. It represents a foundational advancement for high-efficiency, next-generation AI chip manufacturing.